Electron-beam-induced damage in wurtzite InN

Knock-on type damage with ejection of nitrogen atoms from a sample was observed in wurtzite InN during irradiation by 100 keV electron beam in scanning transmission electron microscope. Comparison of the measured integrated intensities of nitrogen $K$ and indium $M_{\text{4,5}}$ edges with calculated mass-loss provided a method to measure the energy of vacancy-enhanced displacement in InN for nitrogen atoms, which was found to be 4.6 eV. The results were also applied to predict the rate of electron beam induced damage that will occur in InN specimens with different thicknesses.