A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
- 31 July 1986
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 9 (4) , 333-343
- https://doi.org/10.1016/0250-6874(86)80065-8
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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