Self-diffraction for intrinsic optical modulation evolution measurement in photoresists
- 15 May 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (10) , 1984-1987
- https://doi.org/10.1364/ao.27.001984
Abstract
Two-wave mixing at a holographic grating being recorded in a positive photoresist film is used for simultaneously and independently stabilizing the holographic setup itself and for measuring the real-time optical modulation evolution during recording. The method is more sensitive than directly measuring the diffraction efficiency with a probe beam, being particularly interesting for very low efficiency values. This technique is used here for studying the photoreaction kinetics in a Shipley AZ-1350J positive photoresist, and measurements agree with those made with a well-established spectrophotometric method.Keywords
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