Dual microwave-r.f. plasma deposition of functional coatings
- 1 December 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 193-194, 965-972
- https://doi.org/10.1016/0040-6090(90)90251-8
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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