Preferential local dissolution of indented silicon {111} surface by aqueous solutions of HF with varying pH
- 31 October 1994
- journal article
- Published by Elsevier in Solid State Ionics
- Vol. 73 (1-2) , 127-137
- https://doi.org/10.1016/0167-2738(94)90272-0
Abstract
No abstract availableKeywords
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