Spin-on-glass thin films prepared from a novel polysilsesquioxane by thermal and ultraviolet-irradiation methods
Open Access
- 1 May 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 345 (2) , 244-254
- https://doi.org/10.1016/s0040-6090(98)01740-4
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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