Analytical assistance in semiconductor and electronic material technology
- 1 January 1983
- journal article
- research article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 314 (3) , 274-284
- https://doi.org/10.1007/bf00516820
Abstract
No abstract availableKeywords
This publication has 25 references indexed in Scilit:
- Interface analysis of high insulating garnet materials using secondary ion mass spectrometrySurface and Interface Analysis, 1982
- The grain boundary of SrTiO3 boundary layer capacitor materialJournal of Materials Science, 1981
- The application of surface analytical techniques to thin films and surface coatingsThin Solid Films, 1981
- Electron probe microanalysis of epitaxial garnet filmsJournal of Crystal Growth, 1981
- Examination of Grain Boundaries of Mn‐Zn Ferrites by AES and TEMJournal of the American Ceramic Society, 1980
- Modern methods for thin film and surface analysesMaterials Science and Engineering, 1980
- X-ray double-crystal diffractometry of Ga1−xAlxAs epitaxial layersJournal of Crystal Growth, 1978
- Modern Methods for Solid Surface and Thin Film AnalysisPhysica Scripta, 1978
- Secondary ion mass spectrometry of compositional changes in garnet filmsJournal of Crystal Growth, 1975
- Profiles of boron implantations in silicon measured by secondary ion mass spectrometryRadiation Effects, 1973