Molecular effect in the expansion of ion implanted InSb
- 1 May 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 182-183, 637-639
- https://doi.org/10.1016/0029-554x(81)90789-8
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Very efficient void formation in ion implanted InSbApplied Physics Letters, 1980