A simple lateral force sensing technique for near-field micropattern generation
- 1 December 1993
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (12) , 3538-3541
- https://doi.org/10.1063/1.1144280
Abstract
We present a simple and general purpose implementation for monitoring the lateral forces between a near‐field optical probe and a surface. A feedback system based on this technique has been incorporated into a near‐field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.Keywords
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