A free-standing microthermopile infrared detector
- 30 April 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 32 (1-3) , 403-406
- https://doi.org/10.1016/0924-4247(92)80020-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Room-temperature CO2 laser radiation detectorApplied Physics Letters, 1991
- High sensitivity and detectivity radiation thermopiles made by multi-layer technologySensors and Actuators A: Physical, 1990
- Fabrication and electrical, mechanical and thermal properties of sub-micron free-standing devicesMicroelectronic Engineering, 1989
- A batch-fabricated silicon thermopile infrared detectorIEEE Transactions on Electron Devices, 1982