“Tunnel” magnetron characteristics and discharge diagnostics
- 1 December 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 86 (2-3) , 227-240
- https://doi.org/10.1016/0040-6090(81)90292-3
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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- Substrate floating potential characteristics in planar magnetron and ht sputtering systemsVacuum, 1980
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