Diffusion coefficient of a pair of nitrogen atoms in float-zone silicon
- 4 July 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (1) , 39-41
- https://doi.org/10.1063/1.100116
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Formation and nature of swirl defects in siliconApplied Physics A, 1975
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- Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor SiliconJournal of the Electrochemical Society, 1973