Silicon oxynitride planar waveguiding structures for application in optical communication
- 1 January 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 4 (6) , 930-937
- https://doi.org/10.1109/2944.736079
Abstract
The refractive index of silicon oxynitride (SiON), a widely used material for integrated optics devices, can be chosen in a wide range between 1.45–2.0. We describe how the consequent large design freedom can be exploited on the one hand for a “standard‿ polarization independent optical channel waveguide having a favorable tradeoff between efficient fiberchip coupling and small bend radii (compact devices) and on the other hand for special-purpose and hybrid components where the refractive index should be finely adjusted for obtaining the desired functionality. We illustrate the applicability of SiON by describing a few devices for optical filtering in a new architecture for wavelength multiplexing, modulation, polarization splitting and second-harmonic generationKeywords
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