A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride
- 30 October 1995
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 86-87
- https://doi.org/10.1109/leos.1995.484609
Abstract
A mode-size adapter was designed, fabricated in SiON/SiO2 and tested. It consists of a laterally tapered SiON waveguide having a step-wise decrease in thickness towards the taper point which may have up to 0.5 ¿m residual widtKeywords
This publication has 3 references indexed in Scilit:
- Vertically tapered spot size transformers fabricatedby a simplemasking techniqueElectronics Letters, 1995
- III–V semiconductor waveguiding devices using adiabatic tapersMicroelectronics Journal, 1994
- Efficient coupling of a semiconductor laser to an optical fiber by means of a tapered waveguide on siliconApplied Physics Letters, 1989