Mechanical design issues in laterally-driven microstructures
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 1060-1064
- https://doi.org/10.1016/0924-4247(90)87089-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990
- Selective chemical vapor deposition of tungsten for microelectromechanical structuresSensors and Actuators, 1989
- Resonant-structure Micromotors: Historical Perspective and AnalysisSensors and Actuators, 1989
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988