Neutral copper cluster sputtering yields: Ne+ Ar+ and Xe+ bombardment
- 1 May 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 90 (1-4) , 518-522
- https://doi.org/10.1016/0168-583x(94)95606-5
Abstract
No abstract availableKeywords
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