31P Nuclear Magnetic Resonance Study of Local Bonding Configuration of Phosphorus in Amorphous Silicon-Hydrogen-Phosphorus Alloys

Publisher Website
Google Scholar
Abstract
31P nuclear magnetic resonance (NMR) spectra have been measured for amorphous hydrogenated silicon heavily doped with phosphorus. Phosphorus is enriched in the film during glow-discharge decomposition of the SiH4-PH3 mixture at a substrate temperature of 250°C by a factor of 3. 31P NMR results demonstrate that almost all the phosphorus atoms are bonded to three silicon atoms, and not to hydrogen or to other phosphorus.