Synthesis, characterization and crystal structure of a new thermally stable and volatile precursor [bis(1,1,1,2,2,3,3,7,7,8,8,9,9,9-tetradecafluorononane-4,6-dionato)2–tetraglyme]barium(II) for MOCVD application
- 1 January 1994
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry
- Vol. 4 (7) , 1061-1066
- https://doi.org/10.1039/jm9940401061
Abstract
The new tetraglyme adduct of barium bis(1,1,1,2,2,3,3,7,7,8,8,9,9,9-tetradecafluorononane-4,6-dionate) complex has been prepared and characterized by X-ray crystallography, 1H and 13C NMR, IR, mass spectrometry and thermogravimetric–differential scanning calorimetric (TG–DSC) analyses. The complex can be easily and cleanly vaporized at 90 °C (10–2mmHg) from the liquid phase. It is thermally stable, volatile and non-hygroscopic. The thermal stability can be attributed to the saturation of coordination sites due to the tetraglyme ligand which appears wrapped around the barium centre. The adduct has been used as an MOCVD precursor for the synthesis of BaPbO3 films by a combined approach of MOCVD and lead vapour diffusion. PbCO3 has been used as lead source.Keywords
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