Cross Section Measurements for Electron-Impact Dissociation of C 4F 8 into Neutral and Ionic Radicals
- 1 June 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (6R) , 3730-3735
- https://doi.org/10.1143/jjap.36.3730
Abstract
The absolute cross sections for electron-impact dissociation of octafluoro-cyclobutane (C4F8) into the neutral radicals CF, CF2, CF3 and C3F5 are measured from the threshold to 250 eV. This measurement was accomplished by appearance mass spectrometry in a dual electron beam device. The threshold energies for the neutral dissociation into CF, CF2 and CF3 are 14.5, 10.5 and 12.8 eV, respectively. The cross sections for dissociation from C4F8 into CF2 and CF are much larger than those from CF4. Besides the neutral dissociation, the cross sections for the dissociative ionization of C4F8 are extensively measured for formation of CF+, CF2 +, CF3 +, C2F3 +, C2F4 + and C3F5 +.Keywords
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