Reactively evaporated titanium nitride resistors for microcircuits
- 1 February 1972
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 11 (1) , 71-78
- https://doi.org/10.1016/0026-2714(72)90830-x
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Reactively sputtered titanium resistors, capacitors and rectifiers for microcircuitsMicroelectronics Reliability, 1967