Metalorganic vapor-phase-epitaxial growth of Fe-doped In0.53Ga0.47As

Abstract
The electrical properties of Fe‐doped In0.53Ga0.47As, grown by metalorganic chemical vapor deposition, are described. Fe concentrations in the 1017–1018 cm3 range are readily obtained, resulting in electrical resistivities of 50–1000 Ω cm. Holes are the majority carrier, but the effective mobility can be predominantly due to minority electrons. From measurements of the temperature dependence of the resistivity and mobility, the Fe acceptor ionization energy of 0.35 eV is determined.