Ultramicrohardness measurements on aluminium films evaporated under various conditions
- 1 March 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 137 (2) , 193-198
- https://doi.org/10.1016/0040-6090(86)90019-2
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Ultramicroindentation apparatus for the mechanical characterization of thin filmsJournal of Applied Physics, 1984
- Hardness measurements of thin filmsThin Solid Films, 1984
- On the mechanism of hillocks formation in vapour deposited thin filmsActa Physica Academiae Scientiarum Hungaricae, 1980
- Formation of aluminium thin films in the presence of oxygen and nickelPhysica Status Solidi (a), 1979
- Ultra-microhardness of vacuum-deposited films II: Results for silver, gold,copper, MgF2, LiF and ZnSThin Solid Films, 1978