SORBAS: An apparatus for investigating ion scattering from surfaces at energies 100-2000 eV
- 1 September 1975
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 8 (9) , 768-772
- https://doi.org/10.1088/0022-3735/8/9/024
Abstract
An UHV apparatus is described which allows energy analysis of low energy rare gas ions backscattered from surfaces in the energy range from 100 to 2000 eV and in a large range of scattering angles. Surface composition is measured by ion scattering and Auger electron spectroscopy. Surface structure of monocrystalline samples is evaluated by LEED. Examples of surface composition analysis and ion impact desorption are given.Keywords
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