Plasma polymerization of tetramethyldisiloxane by a magnetron glow discharge
- 1 December 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 110 (2) , 171-184
- https://doi.org/10.1016/0040-6090(83)90221-3
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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