Changing the surface mechanical properties of silicon and ?-Al2O3 by ion implantation
- 1 November 1984
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 19 (11) , 3524-3545
- https://doi.org/10.1007/bf00552266
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
- Surface softening in silicon by ion implantationJournal of Materials Science, 1984
- Elastic stress fields caused by indenting brittle materialsPhilosophical Magazine A, 1982
- Electron channeling patterns in the scanning electron microscopeJournal of Applied Physics, 1982
- A control and data handling system for microanalysis using charged particle acceleratorsNuclear Instruments and Methods in Physics Research, 1982
- THE EFFECTS OF N2+ ION IMPLANTATION ON THE HARDNESS AND WEAR BEHAVIOUR OF BRITTLE MATERIALSPublished by Elsevier ,1982
- Displacement criterion for amorphization of silicon during ion implantationJournal of Applied Physics, 1981
- Techniques and equipment for non-semiconductor applications of ion implantationNuclear Instruments and Methods in Physics Research, 1981
- Hardness, Toughness, and Brittleness: An Indentation AnalysisJournal of the American Ceramic Society, 1979
- The Ion Implantation of Metals and Engineering MaterialsTransactions of the IMF, 1978
- Damage produced by ion mplantation in siliconRadiation Effects, 1970