A method of determining the depth of impurities by proton-induced X-rays
- 15 April 1977
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 142 (1-2) , 83-84
- https://doi.org/10.1016/0029-554x(77)90812-6
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Determination of the depth of impurity atoms in bulk material by proton-induced x raysJournal of Applied Physics, 1976
- Ion-induced X-ray spectroscopy as a method to determine the depth distribution of trace elementsNuclear Instruments and Methods, 1975
- Depth profile determination by ion-induced X-ray spectroscopyNuclear Instruments and Methods, 1974
- Universal Cross Sections for-Shell Ionization by Heavy Charged Particles. I. Low Particle VelocitiesPhysical Review A, 1973
- Full-range solution for the measurement of thin-film surface densities with proton-excited x raysJournal of Applied Physics, 1972