Multi-aperture extraction system with micro-beamlet switching capability
- 12 November 2001
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 474 (1) , 86-92
- https://doi.org/10.1016/s0168-9002(01)00864-6
Abstract
No abstract availableKeywords
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- Production of low energy spread ion beams with multicusp sourcesNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1996
- Lithography with high depth of focus by an ion projection systemJournal of Microelectromechanical Systems, 1992