The Application of a Flash Discharge Lamp to the Determination of Impurities in Thin Films
- 1 June 1964
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Component Parts
- Vol. 11 (2) , 9-13
- https://doi.org/10.1109/TCP.1964.1135006
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Effects of Nitrogen, Methane, and Oxygen on Structure and Electrical Properties of Thin Tantalum FilmsJournal of Applied Physics, 1964