Pulsed laser atom probe analysis of GaAs and InAs
- 15 March 1985
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 46 (6) , 567-569
- https://doi.org/10.1063/1.95541
Abstract
A pulsed laser atom probe has been used to obtain the first stoichiometrically correct analysis of GaAs and InAs. These results are presented, together with a comparison of results obtained from conventional and pulsed laser atom probes.Keywords
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