Piezoresistive accelerometer with overload protection and low cross-sensitivity
- 31 December 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 39 (3) , 201-207
- https://doi.org/10.1016/0924-4247(93)80220-b
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Analysis on twin-mass structure for a piezoresistive accelerometerSensors and Actuators A: Physical, 1992
- Silicon pressure sensor with integrated bias stabilization and temperature compensationSensors and Actuators A: Physical, 1992
- Precision accelerometers with μg resolutionSensors and Actuators A: Physical, 1990
- An ASIC for high-resolution capacitive microaccelerometersSensors and Actuators A: Physical, 1990
- Accelerometer systems with self-testable featuresSensors and Actuators, 1989
- Study of electrochemical etch-stop for high-precision thickness control of silicon membranesIEEE Transactions on Electron Devices, 1989
- A graphical representation of the piezoresistance coefficients in siliconIEEE Transactions on Electron Devices, 1982
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979
- A review of some charge transport properties of siliconSolid-State Electronics, 1977