Effects of Ar Ion-Beam Etching on Gd-Ba-Cu-O Superconducting Thin Films
- 1 March 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (3A) , L452
- https://doi.org/10.1143/jjap.28.l452
Abstract
The effects of Ar ion-beam etching were investigated for Gd-Ba-Cu-O superconducting thin films prepared on (100) MgO substrates at 650°C by rf magnetron sputtering. Etching at acceleration voltages below 2 kV did not change the zero-resistivity temperature and the critical current at 50 K in spite of a reduction of film thickness. A nonsuperconducting layer was formed near the surface. Surface analyses by X-ray photoelectron spectroscopy suggest that the crystal structure was deformed and the mean value of a Cu valence reduced to +1 by the Ar ion bombardment.Keywords
This publication has 15 references indexed in Scilit:
- Superconducting Lines Fabricated from Epitaxial Y-Ba-Cu-O FilmsJapanese Journal of Applied Physics, 1988
- Bulk superconductivity at 120 K in the Tl–Ca/Ba–Cu–O systemNature, 1988
- A New High-Tc Oxide Superconductor without a Rare Earth ElementJapanese Journal of Applied Physics, 1988
- Chemical Etching of High-Tc Superconducting Films in Feliox-115 SolutionJapanese Journal of Applied Physics, 1988
- The Cu valence in the highT c superconductors and in monovalent, divalent and trivalent copper oxides determined from XPS core level spectroscopyZeitschrift für Physik B Condensed Matter, 1987
- Temperature dependence of the magnetic penetration depth in the high- superconductor : Evidence for conventional -wave pairingPhysical Review B, 1987
- Largely Anisotropic Superconducting Critical Current in Epitaxially Grown Ba2YCu3O7-y Thin FilmJapanese Journal of Applied Physics, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- An ESCA study of the termination of the passivation of elemental metalsThe Journal of Physical Chemistry, 1978
- Paramagnetism and shake-up satellites in X-ray photoelectron spectraChemical Physics Letters, 1974