Superconducting Lines Fabricated from Epitaxial Y-Ba-Cu-O Films
- 1 November 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (11A) , L2237
- https://doi.org/10.1143/jjap.27.l2237
Abstract
High-T c superconducting lines as narrow as 0.8 µm, have been fabricated from Y-Ba-Cu-O films. The films were epitaxially grown on MgO (100) substrates heated at 740°C, by rf magnetron sputtering. The lines were patterned using focused ion-beam lithography and ion-beam etching. The resulting superconducting lines, 1.3 µm wide and 2 mm long, showed a zero resistance temperature of 81 K and a critical current density of 1.5×104 A/cm2 at 77.3 K with smooth surfaces.Keywords
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