Radiation damage and annealing studies of ion-implanted aluminium

Abstract
The effect of implantation induced radiation damage on the oxidation of aluminium has been studied using implanted krypton. Annealing studies have revealed a complex recovery process tentatively ascribed to the repair of point defects, dislocation loops and subsequent grain growth. Higher dose (1O17 ions cm−2) xenon implants resulted in implant out-diffusion and surface exfoliation during annealing.