An efficient macromodeling approach for statistical IC process design
- 6 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
An efficient macromodeling approach for statistical IC process design based on experimental design and regression analysis is described. Automatic selection of the input variables is done as part of the model building procedure to reduce the problem dimension to a manageable size. The resulting macromodels are simple analytical expressions describing the device characteristics in terms of the fundamental process variables. The validity and efficiency of the macromodels obtained by the approach are illustrated through their use in an IC process device design centering example.Keywords
This publication has 5 references indexed in Scilit:
- Application of statistical design and response surface methods to computer-aided VLSI device designIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1988
- Parameter Extraction for Statistical IC Process CharacterizationIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1986
- FABRICS II: A Statistically Based IC Fabrication Process SimulatorIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1984
- A survey of optimization techniques for integrated-circuit designProceedings of the IEEE, 1981
- The simplicial approximation approach to design centeringIEEE Transactions on Circuits and Systems, 1977