Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors
- 1 June 2001
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 13 (6) , 606-608
- https://doi.org/10.1109/68.924038
Abstract
We have developed a novel batch-fabrication single-crystalline silicon micromirror bonding process to fabricate optically flat micromirrors on polysilicon surface-micromachined two-dimensional (2-D) scanners. The electrostatically actuated 2-D scanner has a mirror area of 460 μm×460 μm and an optical scan angle of /spl plusmn/7.5/spl deg/. Compared with micromirror made by standard polysilicon surface-micromachining process, the radius of curvature of the micromirror has been improved by 150 times from 1.8 to 265 cm, with surface roughness <10 nm.Keywords
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