Etchless fabrication of photonic crystals in silicon
- 1 September 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 20 (5) , 2013-2016
- https://doi.org/10.1116/1.1505958
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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