The optical and mechanical properties of carbon films grown using a fast atom beam source
- 31 August 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 47 (1-3) , 722-729
- https://doi.org/10.1016/0257-8972(91)90345-w
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Preparation and properties of diamondlike carbon filmsJournal of Vacuum Science & Technology A, 1989
- Diamond films by ion-assisted deposition at room temperatureJournal of Vacuum Science & Technology A, 1988
- Amorphous carbonAdvances in Physics, 1986
- Micromechanical investigations of amorphous hydrogenated carbon films on siliconJournal of Vacuum Science & Technology A, 1985