Features of and IN SITU measurements on absorbing TiOx films produced by reactive d.c. magnetron-plasmatron sputtering
- 1 October 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 72 (3) , 475-484
- https://doi.org/10.1016/0040-6090(80)90534-9
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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