Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition
- 1 May 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 228 (1-2) , 97-99
- https://doi.org/10.1016/0040-6090(93)90572-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Formation of cBN films by ion beam assisted depositionJournal of Vacuum Science & Technology A, 1992
- Fundamentals of ion-beam-assisted deposition. II. Absolute calibration of ion and evaporant fluxesJournal of Vacuum Science & Technology A, 1990
- Magnetic properties of iron nitride thin films with high corrosion-resistanceIEEE Transactions on Magnetics, 1986