Investigation of the effects of room-temperature nitrogen implantation on the precipitation of aluminium nitride

This publication has 17 references indexed in Scilit:

• Characterization of nitrogen-ion-implanted aluminium
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
• Characterization of surface layers produced by ion implantation of nitrogen in bulk aluminium
  Thin Solid Films, 1989
• Characterization of the aluminium surface layer implanted with nitrogen
  Materials Science and Engineering, 1987
• XPS studies of N + implanted aluminium
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
• Electronic structure of an AlN film produced by ion implantation, studied by electron spectroscopy
  Journal of Applied Physics, 1987
• IR and x-ray studies of ion-beam-synthesized aluminium nitride films
  Thin Solid Films, 1986
• Formation of an AIN continuous layer by Nitrogen ion implantation in aluminium alloys
  Radiation Effects, 1985
• Reaction of N2+ beams with aluminum surfaces
  The Journal of Chemical Physics, 1981
• Formation of chemical compounds by ion bombardment of thin transition metal films
  Physica Status Solidi (a), 1978
• Phase transformations at bombardment of Al and Fe polycrystalline films with B+, C+, N+, P+, and As+ ions
  Physica Status Solidi (a), 1973