Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas
- 20 May 2005
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 38 (11) , 1769-1780
- https://doi.org/10.1088/0022-3727/38/11/018
Abstract
No abstract availableKeywords
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