Multi electron beam lithography: Fabrication of a control unit
- 1 May 1989
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 9 (1-4) , 205-208
- https://doi.org/10.1016/0167-9317(89)90048-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- X-ray lithographyMicroelectronic Engineering, 1985
- X‐Ray Investigation of Boron‐ and Germanium‐Doped Silicon Epitaxial LayersJournal of the Electrochemical Society, 1984