Preparation of ZnO films films by activated reactive evaporation
- 1 September 1990
- journal article
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 5 (9) , 980-981
- https://doi.org/10.1088/0268-1242/5/9/009
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Transparent conducting zinc oxide and indium–tin oxide films prepared by modified reactive planar magnetron sputteringJournal of Vacuum Science & Technology A, 1983
- The preparation and some properties of transparent conducting ZnO for use in solar cellsCanadian Journal of Physics, 1982
- Semiconducting Zinc Oxide Films Prepared by Metal Organic Chemical Vapor Deposition from Diethyl ZincJournal of the Electrochemical Society, 1981
- Transparent and highly conductive films of ZnO prepared by rf reactive magnetron sputteringApplied Physics Letters, 1981
- Optical and electrical properties of ZnO films prepared by spray pyrolysis for solar cell applicationsJournal of Vacuum Science and Technology, 1979