Crystal oscillator film thickness monitor
- 31 August 1964
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 28 (2) , 242-244
- https://doi.org/10.1016/0029-554x(64)90429-x
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Automatic control of film-deposition rate with the crystal oscillator for preparation of alloy filmsVacuum, 1962
- The preparation of thin self supporting boron filmsNuclear Instruments and Methods, 1961