An XPS Study of the Effects of CF4 Plasmas on Gold Surfaces
- 1 September 1985
- journal article
- Published by SAGE Publications in Applied Spectroscopy
- Vol. 39 (5) , 755-760
- https://doi.org/10.1366/0003702854249899
Abstract
X-ray photoelectron spectroscopy has been employed to study the effect of CF4 rf plasmas on gold surfaces. The data indicate that the CF4 plasma converts the inert gold surface into a chemically active surface composed of gold, gold oxide, and gold fluoride. Upon exposure to air, the gold fluoride is hydrolyzed. The modified surface actively adsorbs water. The significance of the results is discussed in terms of microelectronic reliability considerations.Keywords
This publication has 10 references indexed in Scilit:
- Electron spectroscopic characterization of oxygen adsorption on gold surfaces: II. Production of gold oxide in oxygen DC reactive sputteringSurface Science, 1984
- A x-ray photoelectron spectroscopy study of the diffusion of iron, nickel and cobalt through gold filmsThin Solid Films, 1984
- Solution growth of silicon from liquid tin for application to photovoltaic solar cellsSolid-State Electronics, 1984
- Basic chemistry and mechanisms of plasma etchingJournal of Vacuum Science & Technology B, 1983
- Plasma polymerization of fluorocarbons in rf capacitively coupled diode systemJournal of Vacuum Science and Technology, 1981
- Metal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: Effects of hydrogen or oxygenJournal of Applied Physics, 1980
- Plasma polymerization of tetrafluoroethyleneJournal of Applied Polymer Science, 1979
- Applications of ESCA to polymer chemistry. Part VI. Surface fluorination of polyethylene. Application of ESCA to the examination of structure as a function of depthJournal of Polymer Science: Polymer Chemistry Edition, 1975
- ESCA study of sputtered platinum filmsAnalytical Chemistry, 1975
- X-ray photoelectron spectroscopic studies of oxide films on platinum and gold electrodesJournal of the Chemical Society, Faraday Transactions 1: Physical Chemistry in Condensed Phases, 1975