A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives
- 3 October 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (6) , 832-840
- https://doi.org/10.1088/0960-1317/12/6/314
Abstract
No abstract availableKeywords
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