Microfabricated cantilevers for measurement of subcellular and molecular forces
- 1 July 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Biomedical Engineering
- Vol. 45 (7) , 891-898
- https://doi.org/10.1109/10.686797
Abstract
We present two new microfabricated cantilever-beam force transducers. The transducers were fabricated from thin silicon-nitride films, and were used respectively to measure forces generated by two small-muscle preparations: the single myofibril, and the single actin filament in contact with a myosin-coated surface. A simple resonance method was developed to characterize the transducers. Because of the high reproducibility of lever dimensions and the consistency of the modulus of elasticity, few calibration measurements sufficed to characterize the stiffness of all the levers on a single wafer.Keywords
This publication has 13 references indexed in Scilit:
- Multiple- and single-molecule analysis of the actomyosin motor by nanometer-piconewton manipulation with a microneedle: unitary steps and forcesBiophysical Journal, 1996
- An optical fiber transducer for single myofibril force measurementIEEE Transactions on Biomedical Engineering, 1993
- Determination of Young's moduli of micromechanical thin films using the resonance methodSensors and Actuators A: Physical, 1992
- Mechanical Stress of CVD‐DielectricsJournal of the Electrochemical Society, 1992
- Spontaneous oscillation of tension and sarcomere length in skeletal myofibrils. Microscopic measurement and analysisBiophysical Journal, 1992
- Measuring stiffnesses and residual stresses of silicon nitride thin filmsJournal of Electronic Materials, 1990
- Simultaneous recordings of force and sliding movement between a myosin-coated glass microneedle and actin cables in vitro.Proceedings of the National Academy of Sciences, 1989
- Silicon Nitride Fibers Using Micro Fabrication MethodsMRS Proceedings, 1988
- Young’s modulus measurements of thin films using micromechanicsJournal of Applied Physics, 1979
- Miniaturization of Tuning ForksScience, 1968