ELECTROFORMING TECHNIQUES IN THE LIGA PROCESS FOR THE PRODUCTION OF MICRODEVICES

1 January 1989

journal article
research article
Published by Taylor & Francis in Materials and Manufacturing Processes

Vol. 4 (4) , 527-537
https://doi.org/10.1080/10426918908956313

Abstract

At the Karlsruhe Nuclear Research Center a new technology, called LIGA process, is being developed. In this process, synchrotron radiation lithography, electroforming and plastic molding are employed for the fabrication of microdevices with characteristic dimensions of few micrometers and structural heights of several hundred micrometers. Besides the production of metallic microdevices made of nickel, copper or gold, electroforming techniques are also used in fabricating X-ray masks and mold inserts to be utilized in the process. Plating processes used In the LIGA process are being automated for integration in a new clean-room plating machine developed for the mass production of microdevices.

Keywords

This publication has 3 references indexed in Scilit:

Mikromechanik
Published by Springer Nature ,1989
Mask making for synchrotron radiation lithography
Microelectronic Engineering, 1986
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
Microelectronic Engineering, 1986