Surface Modification of Aluminum Nitride and of Aluminum by Excimer Laser
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Excimer Laser-Induced Decomposition of Aluminum NitrideMRS Proceedings, 1991
- Excimer Laser-Induced Surface Activation of Aln for Electroless Metal DepositionMRS Proceedings, 1990
- Laser sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Coupling of Laser Radiation to Metals and SemiconductorsPublished by Springer Nature ,1983
- Coupling of pulsed 0.35-μm laser radiation to aluminum alloysJournal of Applied Physics, 1982