Laser-Enhanced sputter or vapor deposition of thin metallic films on ceramic substrates
- 1 April 1992
- journal article
- Published by Springer Nature in Metallurgical Transactions A
- Vol. 23 (4) , 1095-1103
- https://doi.org/10.1007/bf02665041
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Excimer Laser Drill for Multilayer Printed Circuit Boards: From Advanced Development to Factory FloorMRS Bulletin, 1989
- Laser enhanced adhesion of copper films to sapphire substratesJournal of Vacuum Science & Technology A, 1988
- Dry, laser-assisted rapid HBr etching of GaAsApplied Physics Letters, 1985
- Ultra-shallow high-concentration boron profiles for CMOS processingIEEE Electron Device Letters, 1985
- Low-temperature refractory metal film depositionApplied Physics Letters, 1982
- Ultrafast deep UV Lithography with excimer lasersIEEE Electron Device Letters, 1982
- TRANSIENT LASER-INDUCED PROCESSES IN SEMICONDUCTORSPublished by Elsevier ,1980
- COUPLING OF BEAM ENERGY TO SOLIDSPublished by Elsevier ,1980
- HANDBOOK OF MILITARY INFRARED TECHNOLOGYPublished by Defense Technical Information Center (DTIC) ,1965
- THE TRANSPORT OF HEAT BETWEEN DISSIMILAR SOLIDS AT LOW TEMPERATURESCanadian Journal of Physics, 1959